TMC Revolutionizes Active Vibration Control with Advanced ‘Electro-Damp’ and ‘Stacis’ Systems

January 1, 2023
Sonia Gossai

In today’s vibration control systems, the dichotomy between active and passive systems is gradually becoming blurred, with TMC’s ‘Electro-Damp’ and ‘Stacis’ systems standing out as prime examples of how technology is evolving to address increasingly complex vibration control needs.

‘Electro-Damp’, a parallel type active vibration control system, demonstrates how these systems can be optimized to enhance the efficiency of specific industrial tools. Particularly suited to high-precision tools such as those in semiconductor manufacturing, ‘Electro-Damp’ works in tandem with moving stage technology to cancel out motion-induced vibration, boosting throughput and yield.

On the other hand, the ‘Stacis’ system represents the pinnacle of serial type active vibration cancellation. This innovative solution utilizes a stiff rubber spring that not only supports the payload but also decouples it from the active control system. This creates a system that measures floor vibration rather than the payload. The results? An impressively broad bandwidth for vibration control, extending from below 1Hz to above 100Hz. Such systems like ‘Stacis’ have been invaluable for tools like electron microscopes that are highly sensitive to low-frequency floor vibrations.

Thus, in the quest for the optimal vibration isolation system, ‘active’ isn’t just a buzzword. It’s a commitment to technology that incorporates an inertial sensor, a feedback or feed-forward control loop, and an actuator, all working synergistically to manage and neutralize vibration. TMC is at the forefront of this transformative technology, pushing the boundaries of what’s possible in the field of vibration control.

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